Optimization of Anchor Structure for MEMS Comb Driven Acoustic Emission Transducers Based on the Principles of Area and Gap Changes

The focus of this article is to provide an optimized design scheme for the anchor structure comb capacitive acoustic emission sensor enhance its response ability. Firstly, variable area and spacing sensing microelements were designed, their basic performance parameters obtained through finite element analysis. Using peak changes corresponding first order characteristic frequency as a reference standard, influence geometric section on was analyzed.